Products of QSIL

FUSED QUARTZ CYLINDERS

wafer carrier parts für etching processes

flanges for process tubes

components for ring boats

Fused Quartz Cylinders

Clear Fused Quartz Cylinders

Heavy wall cylinder (billets) are the perfect base material for the manufacture of ring shaped products. Compared to block material, there can be a large savings in both labor and material due to the geometric configuration.

ilmasil® billets have been certified by leading OEMs for the manufacture of components used in semiconductor applications:

  • Wafer carrier parts for etching processes
  • Flanges for process tubes
  • Components for ring boats

Opaque Fused Quartz Cylinders

ilmasil® PO is a brilliant white opaque fused quartz for industrial applications where high purity, thermal shock resistance and thermal shielding are required.

The opacity of this electrically fused material is achieved by controlled distribution of fine microbubbles (typical diameter 10-150µm). There are no additional elements used to achieve opacity.

Physical and thermal properties are similar to clear fused quartz. Flame welding can easily be accomplished without shrinkage.

Low thermal transmittance and conductivity, together with its high purity and superior processing properties, make ilmasil® PO cylinders a perfect starting material for the manufacture of flanges and insulation rings.


Available sizes

Outer Diameter (mm) max. Inner Diameter (mm) min. Inner Diameter(mm)
1059590
12010590
130117105
16014590
180150120
200180140
220190140
240210160
260230160
280245170
300265175
320280185
330290200
350310200
370330250
390340260
410360270
440390290
460420300
500440340
510440340
520460340
540480360
570510370

 

 

Other sizes available upon request!

Cylinder with outer diameter >550 mm up to 800 mm are available by Thermal Reflowing.

Outer Diameter (mm) max. Inner Diameter (mm) min. Inner Diameter(mm)
126113100
14513290
160146130
180166145
200186165
205190170
215199175
225205185
240220204
260240215
280260220
300280265
315295255
335315270
360340275
375355290
414395315
420400330
430400360
465425385
475435395
485445380
510470365
520485430
550490430

 

 

Other sizes available upon request !

Cylinder with outer diameter > 550 mm up to 800 mm are available by Thermal Reflowing.